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Differential resonant MEMS accelerometer: synchronization characteristics of weakly coupled microbeam sensing elements - MaRDI portal

Differential resonant MEMS accelerometer: synchronization characteristics of weakly coupled microbeam sensing elements (Q6115815)

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scientific article; zbMATH DE number 7711989
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Differential resonant MEMS accelerometer: synchronization characteristics of weakly coupled microbeam sensing elements
scientific article; zbMATH DE number 7711989

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    Differential resonant MEMS accelerometer: synchronization characteristics of weakly coupled microbeam sensing elements (English)
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    13 July 2023
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    oscillation synchronization
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    van der Pol oscillator
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    dual-loop self-oscillator mode
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    nonlinear elastic coupling
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    Galerkin method
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    multiscale method
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    local/global bifurcation analysis
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    limit cycle
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