A new method for relaxation of elastic stresses during the growth of heteroepitaxial films (Q6171810)
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scientific article; zbMATH DE number 7713809
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A new method for relaxation of elastic stresses during the growth of heteroepitaxial films |
scientific article; zbMATH DE number 7713809 |
Statements
A new method for relaxation of elastic stresses during the growth of heteroepitaxial films (English)
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18 July 2023
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semipolar aluminum nitride
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nanostructure
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coordinated atoms substitution method
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crystal orientation
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