A new method for relaxation of elastic stresses during the growth of heteroepitaxial films (Q6171810)

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scientific article; zbMATH DE number 7713809
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A new method for relaxation of elastic stresses during the growth of heteroepitaxial films
scientific article; zbMATH DE number 7713809

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    A new method for relaxation of elastic stresses during the growth of heteroepitaxial films (English)
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    18 July 2023
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    semipolar aluminum nitride
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    nanostructure
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    coordinated atoms substitution method
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    crystal orientation
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