Applications of finite element methods for reliability studies on ULSI interconnections. (Q626084)

This monograph provides a detailed description of the application of finite element methods (FEM) to the study of ULSI interconnect reliability. Over the past decades, the application of FEM has become widespread and continues to lead to a much better understanding of reliability physics. The monograph {\parindent=4mm \begin{itemize}\item[--] introduces the principles of FEM, \item[--] reviews numerical modeling of ULSI interconnect reliability, \item[--] describes the physical mechanism of ULSI interconnect reliability encountered in the electronic industry, and \item[--] discusses in detail the use of FEM to understand and improve ULSI interconnect reliability from both the physical and the practical perspective, incorporating the Monte Carlo method. \end{itemize}} A full-scale review of the numerical modeling methodology used in the study of interconnect reliability highlights useful and noteworthy techniques that have been developed recently. Many illustrations are used throughout the book to improve the reader's understanding of the methodology and its verification. Actual experimental results and micrographs on USLI interconnects are also included. The monograph is a good reference book for researchers who are working on interconnect reliability modeling, as well as for those who want to know more about FEM for reliability applications.