An analytical study for nonlinear free and forced vibration of electrostatically actuated MEMS resonators (Q6493275)
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scientific article; zbMATH DE number 7838975
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | An analytical study for nonlinear free and forced vibration of electrostatically actuated MEMS resonators |
scientific article; zbMATH DE number 7838975 |
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An analytical study for nonlinear free and forced vibration of electrostatically actuated MEMS resonators (English)
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26 April 2024
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analytical approximations
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MEMS resonators
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nonlinear dynamics
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free and forced vibration
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primary resonance response
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