Propagation of material and surface profile uncertainties on MEMS micro-resonators using a stochastic second-order computational multi-scale approach (Q6557349)

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scientific article; zbMATH DE number 7867050
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English
Propagation of material and surface profile uncertainties on MEMS micro-resonators using a stochastic second-order computational multi-scale approach
scientific article; zbMATH DE number 7867050

    Statements

    Propagation of material and surface profile uncertainties on MEMS micro-resonators using a stochastic second-order computational multi-scale approach (English)
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    18 June 2024
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    second-order multi-scale
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    stochastic
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    plate finite elements
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    polycrystalline
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    roughness
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    resonance frequency
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