Recursive Bayesian state estimation method for run-to-run control in high-mixed semiconductor manufacturing process (Q6563442)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Recursive Bayesian state estimation method for run-to-run control in high-mixed semiconductor manufacturing process |
scientific article; zbMATH DE number 7872656
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Recursive Bayesian state estimation method for run-to-run control in high-mixed semiconductor manufacturing process |
scientific article; zbMATH DE number 7872656 |
Statements
Recursive Bayesian state estimation method for run-to-run control in high-mixed semiconductor manufacturing process (English)
0 references
27 June 2024
0 references
Bayesian estimation theory
0 references
high-mix semiconductor manufacturing process
0 references
run-to-run control
0 references
state estimation
0 references
