Fast simulation strategy for capacitively-coupled plasmas based on fluid model (Q6660221)
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scientific article; zbMATH DE number 7964622
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Fast simulation strategy for capacitively-coupled plasmas based on fluid model |
scientific article; zbMATH DE number 7964622 |
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Fast simulation strategy for capacitively-coupled plasmas based on fluid model (English)
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10 January 2025
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capacitively coupled plasma
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fluid model
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fast simulation
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