Simultaneous potential and circuit solutions for two-dimensional bounded plasma simulation codes (Q676333)

An algorithm is presented which couples external lumped circuit elements to bounded two-dimensional plasma simulation codes. This allows one to decompose the field solver into a Laplace solver (with boundary conditions eventually on applied potentials) and a Poisson solver (with zero boundary conditions). The method is shown on the simulation of a dually excited capacitively coupled RF discharge. The possibility of applications to a plasma processing reactor is also discussed.