Micromechanical precision pressure sensor incorporating SAW delay lines (Q706427)
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scientific article; zbMATH DE number 2132349
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Micromechanical precision pressure sensor incorporating SAW delay lines |
scientific article; zbMATH DE number 2132349 |
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Micromechanical precision pressure sensor incorporating SAW delay lines (English)
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8 February 2005
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