Curvature dependent electrostatic field in the deformable MEMS device: stability and optimal control (Q827581)
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scientific article; zbMATH DE number 7293735
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Curvature dependent electrostatic field in the deformable MEMS device: stability and optimal control |
scientific article; zbMATH DE number 7293735 |
Statements
Curvature dependent electrostatic field in the deformable MEMS device: stability and optimal control (English)
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13 January 2021
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MEMS device
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electrostatic actuators
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curvature
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