Dynamic pull-in phenomenon in MEMS resonators (Q842099)
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scientific article; zbMATH DE number 5605786
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Dynamic pull-in phenomenon in MEMS resonators |
scientific article; zbMATH DE number 5605786 |
Statements
Dynamic pull-in phenomenon in MEMS resonators (English)
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22 September 2009
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MEMS
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microbeams
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resonators
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pull-in
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primary resonance
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electric actuation
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