Mechanical response of a capacitive microsensor under thermal load (Q868078)
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scientific article; zbMATH DE number 5128155
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mechanical response of a capacitive microsensor under thermal load |
scientific article; zbMATH DE number 5128155 |
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Mechanical response of a capacitive microsensor under thermal load (English)
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19 February 2007
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nonlinear mechanics
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Galerkin method
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MEMS
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instability
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