Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing (Q933314)
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scientific article; zbMATH DE number 5303099
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing |
scientific article; zbMATH DE number 5303099 |
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Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing (English)
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21 July 2008
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semiconductor process
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level set methods
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multigrid methods
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superconformal electrodeposition
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conservative material level set methods
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immersed interface methods
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