Effect of geometry upon the performance of a thin film ferroelectric capacitor (Q957400)
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scientific article; zbMATH DE number 5374679
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Effect of geometry upon the performance of a thin film ferroelectric capacitor |
scientific article; zbMATH DE number 5374679 |
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Effect of geometry upon the performance of a thin film ferroelectric capacitor (English)
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27 November 2008
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finite element method
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edge inclination angle
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etching
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