YiJia Lu
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Person:941772
Available identifiers
zbMath Open lu.yijiaMaRDI QIDQ941772
List of research outcomes
| This list is not complete and representing at the moment only items from zbMATH Open and arXiv. We are working on additional sources - please check back here soon! |
| Publication | Date of Publication | Type |
|---|---|---|
| Three-dimensional discharge simulation of inductively coupled plasma (ICP) etching reactor | 2008-09-02 | Paper |
Research outcomes over time
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