Modeling and modification of the parallel plate variable MEMS capacitors considering deformation issue

DOI10.1016/J.MECHMACHTHEORY.2008.12.006zbMath1161.74026OpenAlexW2028441526MaRDI QIDQ1016932

Dongming Fang, Binzhen Zhang

Publication date: 14 May 2009

Published in: Mechanism and Machine Theory (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.mechmachtheory.2008.12.006

zbMATH Keywords

deflectionpull-in voltageelectrostatic force

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Technical applications of optics and electromagnetic theory (78A55)

Cites Work

• Dynamics and Global Stability of Beam-based Electrostatic Microactuators

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