Solid damping in micro electro mechanical systems

DOI10.1007/s11012-007-9105-3zbMath1163.74494OpenAlexW2124224937MaRDI QIDQ1026529

Raffaele Ardito, Claudia Comi, Alberto Corigliano, Attilio Frangi

Publication date: 25 June 2009

Published in: Meccanica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11012-007-9105-3

zbMATH Keywords

dampingthermoelasticitymechanical dissipationmicroelectromechanical systemsnonlocal model

Mathematics Subject Classification ID

Micromechanics of solids (74M25) Thermal effects in solid mechanics (74F05) Electromagnetic effects in solid mechanics (74F15)

Related Items

Nonlocal coupled photo-thermoelasticity analysis in a semiconducting micro/nano beam resonator subjected to plasma shock loading: a Green-Naghdi-based analytical solution, Validation of PML-based models for the evaluation of anchor dissipation in MEMS resonators, Decoupled three-dimensional finite element computation of thermoelastic damping using Zener's approximation, Modeling squeezed film air damping in torsional micromirrors using extended Kantorovich method, Investigation on a nanomechanical transistor, Sensitivity, probabilistic and stochastic analysis of the thermo-piezoelectric phenomena in solids by the stochastic perturbation technique, A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators, Acoustic vibration problem for dissipative fluids, Uniqueness theorem and Hamilton's principle in linear micropolar thermopiezoelectric/piezomagnetic continuum with two relaxation times

Uses Software

• ARPACK

Cites Work

• Kronecker's canonical form and the QZ algorithm
• Linear theory of nonlocal elasticity and dispersion of plane waves
• On nonlocal elasticity
• The Quadratic Eigenvalue Problem
• ARPACK Users' Guide
• On the evaluation of damping in MEMS in the slip-flow regime
• Nonlocal elasticity and related variational principles