Defect detection in patterned wafers using multichannel scanning electron microscope

DOI10.1016/j.sigpro.2009.02.010zbMath1178.94036OpenAlexW2115011444MaRDI QIDQ1032454

Israel Cohen, Maria Zontak

Publication date: 26 October 2009

Published in: Signal Processing (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.sigpro.2009.02.010

zbMATH Keywords

image reconstructionsimilarity measureanomaly detectionanisotropic kernelssemiconductor defect detection

Mathematics Subject Classification ID

Image processing (compression, reconstruction, etc.) in information and communication theory (94A08) Detection theory in information and communication theory (94A13)

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Defect detection using feature point matching for non-repetitive patterned images ⋮ Image anomalies: a review and synthesis of detection methods

Cites Work

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