Adaptive control to a dry etch process by microcomputer

DOI10.1016/0005-1098(82)90055-3zbMath0493.93031OpenAlexW2072274633MaRDI QIDQ1168929

S. Singh

Publication date: 1982

Published in: Automatica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/0005-1098(82)90055-3

zbMATH Keywords

microcomputersdeadbeat controllersolid-state physicsdry etch processesreal-time control system with adaptive controlrecursive least-squares estimation

Mathematics Subject Classification ID

Nonlinear systems in control theory (93C10) Adaptive control/observation systems (93C40) Estimation and detection in stochastic control theory (93E10) Theory of operating systems (68N25) Ionized gas flow in electromagnetic fields; plasmic flow (76X05) Theory of software (68N99)

Cites Work

• Unnamed Item
• A theoretical analysis of recursive identification methods
• On self tuning regulators

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