Finite element analysis of silicon condenser microphones with corrugated diaphragms

DOI10.1016/S0168-874X(98)00031-6zbMath0920.73356MaRDI QIDQ1274177

Quanbo Zou, Sung Yi, Ming Ying

Publication date: 12 January 1999

Published in: Finite Elements in Analysis and Design (Search for Journal in Brave)

zbMATH Keywords

stress stiffeninggeometrically nonlinear finite element methodmechanical sensitivity of diaphragmoptimum values in design parameters

Mathematics Subject Classification ID

Finite element methods applied to problems in solid mechanics (74S05) Thin bodies, structures (74K99) Optimization problems in solid mechanics (74P99)

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