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A combination of characteristics and Monte Carlo methods for etch profile simulation - MaRDI portal

A combination of characteristics and Monte Carlo methods for etch profile simulation

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Publication:1294150

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DOI10.1016/S0096-3003(97)10017-0zbMath1054.76547OpenAlexW2000383630MaRDI QIDQ1294150

Publication date: 1998

Published in: Applied Mathematics and Computation (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0096-3003(97)10017-0

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