Terminal iterative learning control with an application to RTPCVD thickness control

DOI10.1016/S0005-1098(99)00076-XzbMath0953.93508OpenAlexW2024342027MaRDI QIDQ1307121

Shigehiko Yamamoto, Jian-Xin Xu, Tong-Heng Lee, Yang Quan Chen

Publication date: 7 December 1999

Published in: Automatica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0005-1098(99)00076-x

zbMATH Keywords

convergence analysisdiscrete-time linear systemshigh-order schemerapid thermal processingiterative learning controltracking controlRTPCVDterminal output tracking

Mathematics Subject Classification ID

Application models in control theory (93C95) Design techniques (robust design, computer-aided design, etc.) (93B51)

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