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Numerical simulation of the ion etching process - MaRDI portal

Numerical simulation of the ion etching process

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Publication:1322995

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DOI10.1006/JCPH.1994.1033zbMath0800.76292OpenAlexW2095102235MaRDI QIDQ1322995

Steven A. Orszag, George Em. Karniadakis, Spencer J. Sherwin

Publication date: 10 May 1994

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1006/jcph.1994.1033

Mathematics Subject Classification ID

Finite difference methods applied to problems in fluid mechanics (76M20) General topics in optics and electromagnetic theory (78A99)

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