Solving the mathematical model of the electrode sheath in symmetrically driven rf discharges
From MaRDI portal
Publication:1326690
DOI10.1006/jcph.1994.1068zbMath0796.76096OpenAlexW1998349158MaRDI QIDQ1326690
Natalia Sternberg, Valery A. Godyak
Publication date: 4 October 1994
Published in: Journal of Computational Physics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1006/jcph.1994.1068
Related Items
An asymptotic preserving scheme for the two-fluid Euler-Poisson model in the quasineutral limit, Numerical approximation of the Euler-Maxwell model in the quasineutral limit, Quasi-neutral fluid models for current-carrying plasmas, Boundary conditions and particle loading for the modeling of a semi-infinite plasma., Approximation of the bounded plasma problem by the plasma and the sheath models
