A free boundary value problem for the one dimensional oxidation process of silicon

zbMATH Open0814.92023MaRDI QIDQ1340718

V. Pereyra

Publication date: 12 June 1995

Published in: Computational and Applied Mathematics (Search for Journal in Brave)

zbMATH Keywords

maximum principlenonlinear boundary conditionsdiffusion of oxygenHölder space methodsnonlinear free boundary value problemthermal oxidation process of silicon

Mathematics Subject Classification ID

Chemistry (92E99) Classical flows, reactions, etc. in chemistry (92E20) PDEs in connection with biology, chemistry and other natural sciences (35Q92) Free boundary problems for PDEs (35R35)

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