Effects of aliasing errors on microlithographic image computations

DOI10.1023/A:1025685102440zbMath0899.68118OpenAlexW153613268MaRDI QIDQ1387808

Uwe Hollerbach

Publication date: 8 June 1998

Published in: Journal of Scientific Computing (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1023/a:1025685102440

zbMATH Keywords

computational microelectronics

Mathematics Subject Classification ID

Computing methodologies for image processing (68U10) Computing methodologies and applications (68U99)

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