The effect of laser light propagation through a self-induced inhomogeneous process gas on temperature dependent laser-assisted chemical etching.
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Publication:1399441
DOI10.1016/S0017-9310(02)00299-5zbMath1037.78503MaRDI QIDQ1399441
Mark A. Shannon, James S. jun. Hammonds
Publication date: 30 July 2003
Published in: International Journal of Heat and Mass Transfer (Search for Journal in Brave)
Technical applications of optics and electromagnetic theory (78A55) Lasers, masers, optical bistability, nonlinear optics (78A60) Chemistry (general) in thermodynamics and heat transfer (80A50)
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