A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology

DOI10.1016/S0045-7825(02)00574-1zbMath1026.74068OpenAlexW2163514936MaRDI QIDQ1400232

Paola Causin, Riccardo Sacco

Publication date: 13 August 2003

Published in: Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0045-7825(02)00574-1

zbMATH Keywords

optimal error estimatesstress fieldthermal oxidationdual-mixed-hybrid formulationlocal oxidation structuresemiconductor technology

Mathematics Subject Classification ID

Finite element methods applied to problems in solid mechanics (74S05) Statistical mechanics of superconductors (82D55)

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