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A mechanics prediction of the behaviour of mono-crystalline silicon under nano-indentation.

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Publication:1422989
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DOI10.1016/S0020-7683(03)00119-7zbMath1038.74599OpenAlexW1980101902MaRDI QIDQ1422989

D. Massart

Publication date: 12 February 2004

Published in: International Journal of Solids and Structures (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0020-7683(03)00119-7


zbMATH Keywords

Phase transformationNano-indentationSiliconTheoretical prediction


Mathematics Subject Classification ID

Contact in solid mechanics (74M15) Finite element methods applied to problems in solid mechanics (74S05) Crystals in solids (74N05)


Related Items (1)

Stress induced phase transitions in silicon




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