Computation speedup in the dynamic simulation of MEMS by macromodels

DOI10.1080/10020070312331343430zbMath1244.74223OpenAlexW2023539707MaRDI QIDQ1425362

Siak Piang Lim, Heow-Pueh Lee, Yan-Chun Liang, Wu-zhong Lin, Kwok-Hong Lee

Publication date: 16 March 2004

Published in: Progress in Natural Science (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/10020070312331343430

zbMATH Keywords

proper orthogonal decompositionGaussian quadraturecubic splines approximationdoubly clamped microbeamsqueezed gas film damping

Mathematics Subject Classification ID

Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Fluid-solid interactions (including aero- and hydro-elasticity, porosity, etc.) (74F10) Lubrication theory (76D08)

This page was built for publication: Computation speedup in the dynamic simulation of MEMS by macromodels