Optimization of a horizontal MOCVD reactor for uniform epitaxial layer growth

DOI10.1016/S0017-9310(99)00251-3zbMath0973.76028MaRDI QIDQ1579279

N. Delaunay

Publication date: 5 December 2001

Published in: International Journal of Heat and Mass Transfer (Search for Journal in Brave)

zbMATH Keywords

Chebyshev polynomialsreduced basis methodnumerical optimizationsequential linear programmingnon-orthogonal gridfilm uniformityhorizontal metal-organic chemical vapor deposition reactoroptimal reactor shapeSIMPLE-type finite volume method

Mathematics Subject Classification ID

Finite volume methods applied to problems in fluid mechanics (76M12) Optimization problems in thermodynamics and heat transfer (80M50) Flow control and optimization for incompressible viscous fluids (76D55)

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