Analysis of problem in mathematical model for shadowed sputtering

DOI10.1016/S0010-4655(00)00037-0zbMath0963.65144OpenAlexW2029504034WikidataQ62041301 ScholiaQ62041301MaRDI QIDQ1581141

E. P. Zhidkov, Leonid A. Sevastianov

Publication date: 19 June 2001

Published in: Computer Physics Communications (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0010-4655(00)00037-0

zbMATH Keywords

inverse problemintegral equation of the first kindTikhonov regularization methodsshadowed sputtering

Mathematics Subject Classification ID

Numerical methods for integral equations (65R20) Fredholm integral equations (45B05) Numerical methods for inverse problems for integral equations (65R32)

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