Simulation of coupled diffusion of impurity atoms and point defects under nonequilibrium conditions in local domain

DOI10.1006/JCPH.2002.7029zbMath0994.82099OpenAlexW1967249050MaRDI QIDQ1601555

V. A. Zhuk, A. N. Muchynski, O. I. Velichko, V. A. Tsurko, Vladimir A. Dobrushkin

Publication date: 26 June 2002

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1006/jcph.2002.7029

zbMATH Keywords

point defectcoupled diffusionradiation enhanced diffusionrapid thermal annealing

Mathematics Subject Classification ID

Finite difference methods for initial value and initial-boundary value problems involving PDEs (65M06) Statistical mechanics of semiconductors (82D37)

Related Items (1)

The chemical interaction charged particles with target material under surface treatment of metal with particle beam

Cites Work

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• The use of solution adaptive grids in solving partial differential equations

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