Evaluation of adhesion in microsystems using equivalent rough surfaces modeled with spherical caps

DOI10.1016/J.EUROMECHSOL.2015.12.004zbMath1406.74528OpenAlexW2208636568MaRDI QIDQ1658038

Attilio Frangi, Francesco Rizzini, Raffaele Ardito, Alberto Corigliano

Publication date: 14 August 2018

Published in: European Journal of Mechanics. A. Solids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.euromechsol.2015.12.004

zbMATH Keywords

stictioncontact modelMEMS sensors

Mathematics Subject Classification ID

Micromechanics of solids (74M25) Electromagnetic effects in solid mechanics (74F15)

Related Items (1)

Effect of surface tension on the behavior of adhesive contact based on Maugis-Dugdale model

Cites Work

• Modelling of spontaneous adhesion phenomena in Micro-Electro-Mechanical Systems
• Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS
• Deformation of silicon - insights from microcompression testing at 25-500\(^\circ \)C
• Elastic-Plastic Contact Analysis of a Sphere and a Rigid Flat

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