Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems
DOI10.1016/J.EJOR.2017.02.026zbMath1403.90281OpenAlexW2590662767MaRDI QIDQ1753643
Felix T. S. Chan, Zheng Wang, Wen-Liang Chen
Publication date: 29 May 2018
Published in: European Journal of Operational Research (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.ejor.2017.02.026
queueingproductionsemiconductor manufacturingbi-objective optimizationrobust production capacity planning
Multi-objective and goal programming (90C29) Queues and service in operations research (90B22) Production models (90B30)
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Cites Work
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