Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach

DOI10.1016/J.IJSOLSTR.2004.06.026zbMath1143.74360OpenAlexW2115728545MaRDI QIDQ1777193

Niranjan Chakravarthy

Publication date: 12 May 2005

Published in: International Journal of Solids and Structures (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.ijsolstr.2004.06.026

zbMATH Keywords

FractureThin filmsBrittle materialsMEMSStrength

Mathematics Subject Classification ID

Brittle fracture (74R10) Experimental work for problems pertaining to mechanics of deformable solids (74-05) Thin films (74K35)

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