Mathematical modeling of polish-rate decay in chemical-mechanical polishing

DOI10.1023/A:1020305108358zbMath1008.74526OpenAlexW156119927MaRDI QIDQ1861661

Yanyan Li

Publication date: 10 March 2003

Published in: Journal of Engineering Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1023/a:1020305108358

zbMATH Keywords

Hamilton-Jacobi equationpolymer wearchemical-mechanical polishingrate decaysurfacestatistics

Mathematics Subject Classification ID

Contact in solid mechanics (74M15) Chemical structure in solid mechanics (74E40)

Related Items (2)

Contact mechanics of a dilatant region located at a compressed elastic interface ⋮ Analytical solution for Polish-rate decay in chemical--mechanical polishing

This page was built for publication: Mathematical modeling of polish-rate decay in chemical-mechanical polishing