Tool capacity planning in semiconductor manufacturing.

From MaRDI portal
Publication:1868817

DOI10.1016/S0305-0548(02)00075-8zbMath1037.90513MaRDI QIDQ1868817

Asoo J. Vakharia, Bülent Çatay, S. Selcuk Erenguc

Publication date: 28 April 2003

Published in: Computers \& Operations Research (Search for Journal in Brave)




Related Items (13)




Cites Work




This page was built for publication: Tool capacity planning in semiconductor manufacturing.