Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors

DOI10.1016/j.cam.2003.07.004zbMath1047.82029OpenAlexW1972878656MaRDI QIDQ1877236

Riccardo Sacco, Paola Causin

Publication date: 16 August 2004

Published in: Journal of Computational and Applied Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cam.2003.07.004

zbMATH Keywords

Compressible and incompressible fluid mechanical problemsDual-mixed finite elementsHybrid finite elementsSemiconductor technologyThermal oxidation process

Mathematics Subject Classification ID

Statistical mechanics of semiconductors (82D37) Finite element methods applied to problems in fluid mechanics (76M10) Applications to the sciences (65Z05)

Cites Work

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• Dual hybrid methods for the elasticity and the Stokes problems: A unified approach
• PEERS: A new mixed finite element for plane elasticity
• Mixed and Hybrid Finite Element Methods
• On modelling thermal oxidation of Silicon II: numerical aspects

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