Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing

Meinhard Paffrath, Werner Schmid, Ronald H. W. Hoppe

Publication date: 26 November 1995

Published in: Surveys on Mathematics for Industry (Search for Journal in Brave)

performance iterative methods GMRES preconditioner nonsymmetric linear systems process simulation Bi-CGSTAB conjugate gradient-type algorithms semiconductor processing CGS Broyden type secant method Dopant diffusion

Mathematics Subject Classification ID

Iterative numerical methods for linear systems (65F10) Numerical computation of matrix norms, conditioning, scaling (65F35) Technical applications of optics and electromagnetic theory (78A55) Complexity and performance of numerical algorithms (65Y20) Numerical solution of discretized equations for boundary value problems involving PDEs (65N22)

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