Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing

DOI10.1016/0305-0548(95)00062-3zbMath0847.90073OpenAlexW2059317407MaRDI QIDQ1915979

Suresh H. Patel, Edward A. Rietman, Earl R. Lory

Publication date: 1 July 1996

Published in: Computers \& Operations Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/0305-0548(95)00062-3

zbMATH Keywords

neural networkmodeling and control of processes

Mathematics Subject Classification ID

Production models (90B30) Neural networks for/in biological studies, artificial life and related topics (92B20) Case-oriented studies in operations research (90B90)

Related Items (1)

A bibliography of neural network business applications research: 1994--1998

Cites Work

• Learning Process in an Asymmetric Threshold Network
• A logical calculus of the ideas immanent in nervous activity
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