Numerical study of a three-dimensional chemical vapor deposition reactor with detailed chemistry

DOI10.1006/jcph.1996.0117zbMath0853.76091OpenAlexW2060481278MaRDI QIDQ1917106

Alexandre Ern, Vincent Giovangigli, Mitchell D. Smooke

Publication date: 13 January 1997

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1006/jcph.1996.0117

zbMATH Keywords

thermal diffusionenergy balance equationmulticomponent diffusioncentral differencescarbon incorporationchemical species profilesFORTRAN librariesgallium arsenide growthiterative transport algorithmstrimethylgalliumvorticity-velocity form steady-state Navier-Stokes equations

Mathematics Subject Classification ID

Classical flows, reactions, etc. in chemistry (92E20) Finite difference methods applied to problems in fluid mechanics (76M20) Reaction effects in flows (76V05)

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