Processing chip for thin film bulk acoustic resonator mass sensor

DOI10.1155/2012/923617zbMath1263.93162OpenAlexW2134677088WikidataQ58908054 ScholiaQ58908054MaRDI QIDQ1953714

Hao Jin, Pengcheng Jin, Mengjun Wu, Shurong Dong

Publication date: 10 June 2013

Published in: Journal of Control Science and Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1155/2012/923617

zbMATH Keywords

film bulk acoustic resonator (FBAR) mass sensorintegrated process chip

Mathematics Subject Classification ID

Application models in control theory (93C95)

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