Computation of 3D MEMS electrostatics using a nearly exact BEM solver
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Publication:1958213
DOI10.1016/j.enganabound.2006.03.002zbMath1195.78069OpenAlexW2090825500MaRDI QIDQ1958213
Publication date: 28 September 2010
Published in: Engineering Analysis with Boundary Elements (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.enganabound.2006.03.002
Boundary element methods applied to problems in optics and electromagnetic theory (78M15) Electro- and magnetostatics (78A30)
Related Items (2)
A study of three-dimensional edge and corner problems using the nebem solver ⋮ Application of bicubic splines in the boundary element method
Cites Work
- Improved extrapolation technique in the boundary element method to find the capacitances of the unit square and cube
- Heritage and early history of the boundary element method
- Electrostatic BEM for MEMS with thin conducting plates and shells
- On the application of 2D potential theory to electrostatic simulation
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