Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS

DOI10.1016/j.enganabound.2006.03.013zbMath1195.78065OpenAlexW2065823821MaRDI QIDQ1958242

Hui Chen, Subrata Mukherjee

Publication date: 28 September 2010

Published in: Engineering Analysis with Boundary Elements (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.enganabound.2006.03.013

zbMATH Keywords

boundary element methodsbeamsmicroelectromechanical systemsnanotubesnanoelectromechanical systemsmodeling of ground

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Boundary element methods applied to problems in optics and electromagnetic theory (78M15)

Related Items (2)

Charge distribution on narrow MEMS beams of nearly square cross‐section ⋮ Charge distribution on thin semiconducting silicon nanowires

Cites Work

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• The boundary contour method for two-dimensional linear elasticity with quadratic boundary elements
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• Finite parts of singular and hypersingular integrals with irregular boundary source points
• BEM modeling of damping forces on MEMS with thin plates
• An extended boundary node method for modeling normal derivative discontinuities in potential theory across edges and corners
• Electrostatic BEM for MEMS with thin conducting plates and shells
• Multipole BEM for the evaluation of damping forces on MEMS
• Electrostatic BEM for MEMS with thin beams
• Numerical Analysis of Nanotube-Based NEMS Devices—Part I: Electrostatic Charge Distribution on Multiwalled Nanotubes
• DYNAMIC ANALYSIS OF MICRO-ELECTRO-MECHANICAL SYSTEMS
• On the application of 2D potential theory to electrostatic simulation
• Charge distribution on thin conducting nanotubes—reduced 3‐D model

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