BEM approaches and simplified kinetic models for the analysis of damping in deformable MEMS

DOI10.1016/j.enganabound.2006.11.010zbMath1195.76276OpenAlexW2032732632MaRDI QIDQ1958325

Yanyan Li

Publication date: 28 September 2010

Published in: Engineering Analysis with Boundary Elements (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.enganabound.2006.11.010

zbMATH Keywords

Stokes flowMEMSdamping forcesmultipole accelerators

Mathematics Subject Classification ID

Stokes and related (Oseen, etc.) flows (76D07) Boundary element methods applied to problems in fluid mechanics (76M15)

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Cites Work

• Mathematical models in rarefied gas dynamics
• The Boltzmann equation and its applications
• A qualocation enhanced approach for Stokes flow problems with rigid-body boundary conditions
• A fast multipole implementation of the qualocation mixed-velocity-traction approach for exterior Stokes flows
• On the evaluation of damping in MEMS in the slip-flow regime
• A Model for Collision Processes in Gases. I. Small Amplitude Processes in Charged and Neutral One-Component Systems