Model of PE-CVD apparatus: verification and simulations

DOI10.1155/2010/407561zbMath1425.76219OpenAlexW1983528462WikidataQ58653072 ScholiaQ58653072MaRDI QIDQ1958829

Yanyan Li

Publication date: 30 September 2010

Published in: Mathematical Problems in Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1155/2010/407561

Mathematics Subject Classification ID

Flow control and optimization for compressible fluids and gas dynamics (76N25)

Related Items

Multiscale modelling and splitting approaches for fluids composed of Coulomb-interacting particles

Uses Software

• UG

Cites Work

• Unnamed Item
• Unnamed Item
• Unnamed Item
• Unnamed Item
• Global extrapolation with a parallel splitting method
• Flux-based method of characteristics for contaminant transport in flowing groundwater
• An Asymptotic Analysis for a Model of Chemical Vapor Deposition on a Microstructured Surface
• Applied Multivariate Analysis
• Finite Volume Methods for Hyperbolic Problems
• UG -- a flexible software toolbox for solving partial differential equations