Molecular dynamics study of diffusion and atomic configuration in layered structures for Al circuit interconnects

DOI10.1007/S004660050447zbMath0940.35194OpenAlexW1982568251MaRDI QIDQ1970782

Yanyan Li

Publication date: 27 July 2000

Published in: Computational Mechanics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s004660050447

zbMATH Keywords

molecular dynamicselectromigration-induced open-circuit failures in Al interconnects

Mathematics Subject Classification ID

Thin films (74K35)

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