Selection of measurement locations for the control of rapid thermal processor

DOI10.1016/S0005-1098(99)00197-1zbMath0945.93591OpenAlexW2065056107MaRDI QIDQ1974003

Cheng-Ching Yu, Chi-Jay Huang, Shih-Haur Shen

Publication date: 10 October 2000

Published in: Automatica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/s0005-1098(99)00197-1

Mathematics Subject Classification ID

Application models in control theory (93C95)

Related Items (2)

Thermal budget control for processes with spike-shaped temperature profiles: Application to rapid thermal annealing ⋮ Transient inverse design of radiative enclosures for thermal processing of materials

Cites Work

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• Internal model control: robust digital controller synthesis for multivariable open-loop stable or unstable processes
• Partial state model reference adaptive control of a rapid thermal processor
• A pole placement adaptive control of a rapid thermal processor

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