Frequency response reduced order model of primary resonance of electrostatically actuated MEMS circular plate resonators

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Publication:2005011

DOI10.1016/j.cnsns.2016.06.032zbMath1456.74049OpenAlexW2471153353MaRDI QIDQ2005011

Reynaldo Oyervides, Dumitru I. Caruntu

Publication date: 7 October 2020

Published in: Communications in Nonlinear Science and Numerical Simulation (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cnsns.2016.06.032




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